RF Plasma Generators AX series
Features
- Class AB Linear AMP able to withstand high reflection
- High reliability, High durability design
AX Series Specifications
| Frequency | 400kHz | 〇 | 〇 | |||||||||
|---|---|---|---|---|---|---|---|---|---|---|---|---|
| 2MHz | 〇 | 〇 | ||||||||||
| 13.56MHz | 〇 | 〇 | 〇 | 〇 | 〇 | 〇 | 〇 | 〇 | 〇 | 〇 | ||
| 27.12MHz | 〇 | 〇 | 〇 | 〇 | ||||||||
| Rated Output (W) | 300 | 600 | 1000 | 1500 | 2000 | 3000 | 5000 | 7500 | 10000 | 20000 | 30000 | |
| Power Supply | Single-phase AC200-240V |
Three-phase AC200-240V |
Three-phase AC440-480V |
|||||||||
| Weight（Kg) | 11 | 25 | 36 | 25 | 40 | 32 | 62 | 235 | 320 | 560 | 570 | |
| External dimensions (mm) |
Width （W) | 430 | 430 | 430 | 430 | 430 | 430 | 550 | 570 | 700 | 850 | |
| Depth（L) | 370 | 500 | 450 | 550 | 550 | 670 | 670 | 800 | 850 | 850 | ||
| Height（H) | 132.5 | 132.5 | 177 | 177 | 221 | 266 | 266 | 800 | 1106 | 1300 | ||
| Cooling method | Forced air cooling | forced air cooling + water cooling | ||||||||||
Inquiries about products and services
Phone number／084-945-1300
Reception hours / 9:00 to 18:00 (excluding weekends, holidays and non-business days)