株式会社アドテックプラズマテクノロジー

Patents

Patents

日本 Japan

Coaxial microwave plasma torch2008
Plasma generator ozone generator substrate processing apparatus and manufacturing method of Semiconductor device2010
Microwave plasma generation method and microwave plasma generator2010
Object processing apparatus and plasma facility comprising the same2011
Plasma generating electrode and plasma generating method2012
Plasma processing system2013
Cavity resonator of microwave plasma generating apparatus2014
Impedance matching device provided in high frequency power system2019

アメリカ America

Object processing apparatus and plasma facility comprising the same2008
Plasma generator ozone generator substrate processing apparatus and manufacturing method of semiconductor device2009
Coaxial microwave plasma torch 2010
Cavity resonator of microwave plasma generating apparatus2016

フランス France

Object processing apparatus and plasma facility comprising the same 2007

英国 United Kingdom

Object processing apparatus and plasma facility comprising the same 2007
Coaxial microwave plasma torch2016

ドイツ Germany

Object processing apparatus and plasma facility comprising the same 2007
Coaxial microwave plasma torch 2016

韓国 Korea

Object processing apparatus and plasma facility comprising the same 2007
Cavity resonator of microwave plasma generating apparatus 2016

カナダ Canada

Coaxial microwave plasma torch 2014

スイス Switzerland

Coaxial microwave plasma torch 2016

台湾 Taiwan

Cavity resonator of microwave plasma generating apparatus2016