Patents
Japan
| Coaxial microwave plasma torch | 2008 |
| Plasma generator ozone generator substrate processing apparatus and manufacturing method of Semiconductor device | 2010 |
| Microwave plasma generation method and microwave plasma generator | 2010 |
| Plasma generating electrode and plasma generating method | 2012 |
| Cavity resonator of microwave plasma generating apparatus | 2014 |
| Impedance matching device provided in high frequency power system | 2019 |
| High frequency power source allowing arbitrary setting of temporal change pattern for high frequency output power | 2021 |
| Electrical Path Switching Device | 2021 |
America
| Plasma generator ozone generator substrate processing apparatus and manufacturing method of semiconductor device | 2009 |
| Coaxial microwave plasma torch | 2010 |
| Cavity resonator of microwave plasma generating apparatus | 2016 |
United Kingdom
| Coaxial microwave plasma torch | 2016 |
Germany
| Coaxial microwave plasma torch | 2016 |
Korea
| Impedance matching device provided in high-frequency power system | 2020 |
Canada
| Coaxial microwave plasma torch | 2014 |
Switzerland
| Coaxial microwave plasma torch | 2016 |
Taiwan
| Impedance matching device provided in high-frequency power system | 2020 |