Products handled by ADTEC Plasma Technology
RF Plasma Generators
- Highly durable and reliable design to withstand high reflection
- Cost saving model is available
- Latest CPU installed
(Faster response) - New communication methods supported
(EtherCAT compatible)
Automatic Impedance Matching Boxes
- Automatic high speed matching is possible
- Monitoring of chamber impedance on Smith Chart
- Real-time display of forward-/reflected- waves, and power, etc. with dedicated software
Products handled by IDX
DC Power Supply
- Multiple output mode changes possible with a single unit
Variable Duty, Bipolar Output
DC Output, DC PULSE Output - Equipped with high-speed arc cutoff function
Microwaves
- Compatible with equipment for plasma process systems
- It can be installed in various environments since it is not affected by exhaust heat from high-voltage power supply and oscillator.