RF Plasma Generators TXR, TXL, TXM, TXHseries
Features
- Equipped with the latest CPU (High-speed response UP)
- New communication methods supported (EtherCAT compatible)
Options
- PULSE
- VF (variable frequency)
- Arc Cut
TXR Series Specifications
| Frequency | 13.56MHz | 〇 | 〇 | 〇 | 〇 | 〇 | 〇 | |
|---|---|---|---|---|---|---|---|---|
| 27.12MHz | 〇 | |||||||
| Rated output (W) | 300 | 600 | 1000 | 3000 | 5000 | 10000 | 20000 | |
| Power supply | Single-phase AC200-240V |
Three-phase AC200-240V |
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| Weight（Kg) | 13 | 13 | 13 | 26 | TBD | 81 | 150 | |
| External dimensions (mm) |
Width （W) | 215 | 215 | 215 | 215 | 430 | 650 | |
| Depth（L) | 498 | 498 | 498 | 598 | 700 | 800 | ||
| Height（H) | 133 | 133 | 133 | 221 | 265 | 700 | ||
| Cooling method | Forced air cooling | forced air cooling + water cooling | ||||||
TXL Series Specifications
| Frequency | 400kHz | 〇 | 〇 | 〇 | 〇 |
|---|---|---|---|---|---|
| Rated output(W) | 500 | 1000 | 2000 | 3000 | |
| Power supply | Three-phase AC200-240V |
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| Weight （Kg) | 16 | 16 | TBD | ||
| External dimensions (mm) |
Width（W) | 215 | 215 | ||
| Depth（L) | 628 | 628 | |||
| Height （H) | 145 | 145 | |||
| Cooling method | Forced air cooling | forced air cooling + water cooling | |||
TXM Series Specifications
| Frequency | 2MHz | 〇 | 〇 | 〇 | 〇 | 〇 |
|---|---|---|---|---|---|---|
| 4MHz | 〇 | 〇 | ||||
| Rated output (W) | 800 | 1600 | 2400 | 3200 | 5000 | |
| Power supply | Three-phase AC200-240V |
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| Weight （Kg) | TBD | |||||
| External dimensions (mm) |
Width（W) | |||||
| Depth （L) | ||||||
| Height（H) | ||||||
| Cooling method | Forced air cooling | forced air cooling + water cooling | ||||
TXH Series Specifications
Coming soon!
| Frequency | 40MHz | 〇 | 〇 | |
|---|---|---|---|---|
| 60MHz | 〇 | |||
| Rated output (W) | 1600 | 2400 | 3000 | |
| Power supply | Three-phase AC200-240V |
|||
| Weight （Kg) | TBD | |||
| External dimensions (mm) |
Width（W) | 430 | 430 | 430 |
| Depth（L) | 600 | 600 | 600 | |
| Height（H) | 177 | 177 | 177 | |
| Cooling method | Forced air cooling | forced air cooling + water cooling | ||
Inquiries about products and services
Phone number／084-945-1300
Reception hours／9:00 to 18:00 (excluding weekends, holidays and non-business days)