Microwave
Features
- Compatible with equipment for plasma process systems
- High-voltage Power supply and Oscillator Weight reduction
- Use a low drift magnetron
- RS485 (Standard equipment) for devices and Microwave power supply control
- Compatible with other digital communications
- It can be installed in various environments since it is not affected by exhaust heat from high-voltage power supply and oscillator
- Built-in isolator (transmitter + isolator integrated)
Specifications
| Receiving power | 3Φ AC200V ± 10% 50 / 60Hz 20A or less |
|---|---|
| Maximum output | 3000W |
| Variable output range | 300W～3000W * Note: Depending on the characteristics of the magnetron, the output linear accuracy is not guaranteed at an output of 600 W or less. |
| Output linear accuracy | Within ± 3% of the set power |
| Output stability | Within ± 1% for ± 10% fluctuation of power supply voltage |
| Output ripple | 5% p-p or less |
| Cooling method | Water cooling |
| Size | W480xH221.5xD631（mm） |
| Weight | About 30kg |
Dimensions
Inquiries about products and services
Phone number ／0283-85-7200
Reception hours / 8:30 to 17:00(excluding weekends, holidays and non-business days)
Microwave autotuner
Specifications
| Frequency range | 2450MHz±30MHz |
|---|---|
| Allowable passing power | 3kW continuous wave (power ripple 10% or less) |
| Matching accuracy | Within 1% (power ratio) * |
| Matching speed | Within 3 seconds * |
| Cooling method | Water cooling |
*Experimental results using our test equipment using a dummy load as the load.
※Please contact us for detailed specifications.
Inquiries about products and services
Phone number／0283-85-7200
Reception hours / 8:30 to 17:00(excluding weekends, holidays and non-business days)