株式会社アドテックプラズマテクノロジー

DC Power Supply

DC Power Supply Bipolar Power Supply BP020A 

チャンバーアナライザー ACA-500

Features

  • Multiple output mode changes possible with a single unit
    Duty variable, bipolar output, DC output, DC pulse output
  • Output voltage 1000V High withstand voltage specifications,SiC Power module adopted
  • High-speed Arc cutoff function by high-speed digital hardware
  • Enclosed water-cooling structure eliminates the effects of exhaust heat and allows for a wide range of installation locations

Specifications

Receiving power Three-phase AC380V±10% (47-63Hz)
Rated power 20kW
Rated voltage 1000V(~20A)
Rated current 40A(~500V)
Output frequency 20・40・60・80kHz(selectable)
Ignition output 2000V
Cooling method Water-cooling sealed type
industrial water / flow rate: 7L / min (0.7Mpa or less)
Size W482xH266xD800(mm)
Weight About 70kg
Inquiries about products and services
Phone number/0283-85-7200
Reception hours / 8:30 to 17:00 (excluding weekends, holidays and non-business days)

DC power supply Bipolar power supply BP010A

Coming soon!

Specifications

Receiving power Three-phase AC380V±10% (47-63Hz)
Rated power 1000V(~10A)
Rated voltage 25A(~400V)
Output frequency 20・40・60・80kHz(selectable)
Ignition output 2000V
Cooling method Water-cooling sealed type
Size TBD
Weight TBD

※Please contact us for detailed specifications

Electrostatic Chuck Power supply

Features

  • UL compliant, High voltage output with output voltage ± 10kV
  • High Voltage Power Supply for Electrostatic Chucks equipped with Polarity Reversing Function and Forced Grounding Function
  • Digital Control, External communication (RS-232C), Analog output monitor (voltage, current) function
  • Reliable protection circuit against discharge, short circuit, overload, etc. on the load side
  • Dedicated external RF filter box is available to protect the Power supply from RF noise.

Specifications

Receiving power DC24Vdc(22Vdc~28Vdc)
Rated voltage ±10kVdc
Rated current ±1mA
Ripple voltage 1%pp
Output stability 100Vdc(at rated output)
Load range 10MΩ (allowable value: 8 to 50MΩ)
Cooling method Air cooling (no corrosive gas)
Size W480xH149xD500(mm)
Weight About 9.7kg
Inquiries about products and services
Phone number /0283-85-7200
Reception hours / 8:30 to 17:00 (excluding weekends, holidays and non-business days)