RF Plasma Generators TXR, TXL, TXM, TXHseries
Features
- Equipped with the latest CPU (High-speed response UP)
- New communication methods supported (EtherCAT compatible)
Options
- PULSE
- VF (variable frequency)
- Arc Cut
TXR Series Specifications
| Frequency | 13.56MHz | 〇 | 〇 | 〇 | 〇 | |
|---|---|---|---|---|---|---|
| 27.12MHz | 〇 | |||||
| Rated output (W) | 300 | 600 | 1000 | 3000 | 10000 | |
| Power supply | Single-phase AC200-240V |
Three-phase AC200-240V |
||||
| Weight（Kg) | 13 | 13 | 13 | 26 | 81 | |
| External dimensions (mm) |
Width （W) | 215 | 215 | 215 | 215 | 430 |
| Depth（L) | 498 | 498 | 498 | 598 | 700 | |
| Height（H) | 133 | 133 | 133 | 221 | 265 | |
| Cooling method | Forced air cooling | forced air cooling + water cooling | ||||
TXL Series Specifications
| Frequency | 400kHz | 〇 | 〇 |
|---|---|---|---|
| Rated output(W) | 500 | 1000 | |
| Power supply | Three-phase AC200-240V |
||
| Weight （Kg) | 16 | 16 | |
| External dimensions (mm) |
Width（W) | 215 | 215 |
| Depth（L) | 628 | 628 | |
| Height （H) | 145 | 145 | |
| Cooling method | Forced air cooling | ||
TXM Series Specifications
| Frequency | 2MHz | 〇 | 〇 |
|---|---|---|---|
| Rated output (W) | 2500 | 5000 | |
| Power supply | Three-phase AC200-240V |
||
| Weight （Kg) | 21 | 56 | |
| External dimensions (mm) |
Width（W) | 215 | 430 |
| Depth （L) | 550 | 650 | |
| Height（H) | 177 | 221 | |
| Cooling method | forced air cooling + water cooling | ||
Inquiries about products and services
Phone number／084-945-1300
Reception hours／9:00 to 18:00 (excluding weekends, holidays and non-business days)