株式会社アドテックプラズマテクノロジー

RF Plasma Generators
TS series

RF Plasma Generators TS series

Product Features

  • Adopted Class E switching AMP with high efficiency
  • Significantly reduced cost, Significantly downsized model

Specification

Applicable frequency 13.56MHz
Rated Power(W) 5000 10000 20000 30000
Power supply Three-phase
AC200-240V
AC380-480V
Weight(Kg) 25 46 100 150
External Dimensions(mm)        
Width(W) 215 430 430 430
Depth(L) 700 650 650 650
Height(H) 177 174.5 332 525.7
Cooling System Forced air cooling + Water cooling
Inquiries about products and services
TEL/+81-84-945-1300
OPEN: 9:00 – 18:00 (excluding weekends and holidays)